Research and Educational Micro-Nano-Technology Center (MNTC)

     The MNTC consists of three laboratories acting in common:

     1.  A research Adaptive Micro-Nano-Optics Laboratory (AMNOL).

     The AMNOL at the MNTC is staffed by experts in micro- and nano-technology, optical materials, and physics. Among the priorities of the AMNOL are investigations in advanced materials, micro- and nano-lithography, design, development of fabrication technology and characterization of passive and active micro- and nano-optics and diffractive micro-optical devices and components.

     2. A research Micro-Nano-Structures Laboratory of (MNSL).  

     A new important scientific direction related to research and development of micro- and nano-structuring, particularly fabrication technology of micro- and nano-tubes, is developed at JCT.      

     The MNSL at the MNTC is staffed by experts in micro- and nano-technology,   metals, semiconductor and polymer materials, and physics. Among the priorities of the MNSL are micro- and nano-structuring, investigations in advanced materials, development of fabrication technology of micro- and nano-tubes for electronic, electrical, optical, mechanical, chemical applications. These techniques based on thin film deposition, micro-, nano-patterning, precision etching processes developed by the AMNOL. 

     3. An Educational Laboratory of “Fundamentals of Micro- and Nano-technology” (ELFMNT). 

     Experts of the ELFMNT provide Project Supervision and Laboratory Training for JCT students of the Electronics, Electro-optics, Medical Engineering Departments and also for students of Advanced Materials Engineering Department (Jerusalem College of Engineering) using the Clean Room and existing micro-nano-technology equipment presently at the JCT. The students are exposed to theoretical, technological and practical knowledge in a modern and important area of micro- and nano-technology. Their competition in the high technology area is strongly increased.

Educational Laboratory “Fundamentals of Micro- and Nano-technology”

Laboratory Training

     1. Micro-patterning based on contact photolithography.

     2. Micro-patterning based on lift-off micro-lithography and vacuum thermal evaporation of metal layers;  characterization of fabricated micro-features.

     3. Halftone photolithography processing for 3D-micro-structure fabrication; characterization of fabricated 3D-micro-structures.

     4. Passive micro-lens arrays; characterization of fabricated samples.

     5. Passive micro-mirror arrays; characterization of fabricated samples.

     6. Adaptive micro-lens arrays; characterization of fabricated samples.

     7. Adaptive micro-mirror arrays; characterization of fabricated samples.

     8. Seminars on Modern Micro- and Nano-lithography.  

     Micro-nano-technology equipment available at the MNTC

     The MNTC at JCT is equipped with the following facilities:

Conventional Mask-aligner; Double-sided Mask-aligner; Exposure System for micro-resist processing based on Oriel Series SS 1000 Light Source; Micro-resist Spinner; Vacuum Systems for the thermal evaporation of metals and dry micro- and nano-resists; Liquid Crystal Cell Assembly System; Computerized Ultra Clean 100 oven; Digital Hotplate;  Layer Alignment Rubbing Device; Computerized Optical Measurement Station based on “Wentworth Labs” Microscope for characterization of active micro-optic components;  3D Measurement System based on Computerized Interference Microscope, ZYGO; Interference Microscope MII – 4; 3D Measurement System based on Multi-wavelength Confocal Microscope CHRIS, STIL S.A.;  Computerized Atomic Force Microscope; Optical Microscopes; Polarized Microscope, Balplan;  Optical Table TMC, model # 788 – 455 – 12, with set of optical and mechanical components;  Liquid nitrogen and oxygen Dewars as sources of clean dry gases for thermal and cleaning processes; Clean rooms: Class 10,000 - for general technology processing and Class 100 – for micro- and nano-lithography processes.

     Personnel (with photos)

1. Michael Manevich, Head of the Micro-Nano-Technology Center, Associate Professor, Ph.D.

2. Yuriy Reznikov, Consultant at the MNTC, Professor (AMNOL)

3. Joseph Varshal, Researcher, M.Sc. (AMNOL)

4. Eli Reznikov, Researcher, Ph.D. (AMNOL)

5. Dr. David Gelman, Senior Lecture, Researcher (ELFMNT, AMNOL)

6. Ygal Eisenberg, Researcher, M.Sc. (MNSL)

7. Andrey Shubine, Research Assistant (MNSL)

8. Menachem Abitbol, Research Assistant (MNSL)

9. Refael Ganz, Research Assistant (MNSL)

10. Binyamin Helman, Research Assistant (AMNOL)

11. David Shmuel, Research Assistant (AMNOL)

 Michael Manevich, Head of the Micro-Nano-Technology Center, Associate Professor, Ph.D. He received his M.Sc. and Ph.D. at the Novosibirsk Technical University (Russia). His scope of the scientific interests includes research in the micro- and nano-structure technology field: integrated optics, micro-optics    and    diffractive   optical   components   for   the visible   and   infra-red  ranges, fabrication technology, design, measurement,   testing and application; new organic and inorganic photosensitive materials, including organic photopolymers and chalcogenide glassy semiconductors; design, fabrication technology and characterization of passive and active liquid crystal micro-optic and diffractive optic devices and components. He has extensive experience in development of design and fabrication technologies of micro-optic structures using wet and dry micro-, nano-lithography processes; characterization of 3D-shaped micro- and nano-structures, including optical microscopy, interferometric microscopy and atomic force microscopy. He has extensive experience in implementation of many research projects and 8 joint projects with Israeli and American industrial companies. He has more than 130 publications and 11 inventions and patents in the field of advanced materials and micro-, nano-fabrication technology.

     Currently he is a Principal Investigator of two projects:

     1. "LC4LM – Liquid Crystal Devices for Laser Micromachining", a joint Project with Orbotech Ltd (Yavne, Israel) funded by the Ministry of Industry and Trade State of Israel (Program “Magneton”).

     2. "Investigation of new phenomena in super-thin films; feasibility study of micro-tube formation", funded by JCT R&D Authority.

Yuriy Reznikov, Professor, Consultant at the MNTC, is one of the world-leading experts in science and application of liquid crystals. He is a Chief of Crystals Department of the Institute of Physics of Ukrainian Academy of Sciences. Research of Prof. Reznikov concerns a lot of aspects of liquid crystals fundamentals and applications.

Among his most known achievements are:

     1. Photoalignment of liquid crystals and development of photoaligning materials.

     2. Study of light-induced effects and non-linear optics of liquid crystals.

     3. Investigation of composite liquid crystal systems.

     Prof. Reznikov provides extremely extended collaboration with a leading liquid crystal centers in the USA, UK, Italy, France, Korea and Poland. Collaboration of the team of Prof. Reznikov with the foreign partners is provided owing to numerous  international grants that were won by Prof. Reznikov and his team during last decades: 3 grants from CRDF (US government grant), 5 grants INTAS (EU grants), 2 grants from NATO, Econet grant (France government grant). He has more than 170 publications and 21 patents in the field of advanced liquid crystal materials.

Joseph Varshal, M.Sc. He received his M.Sc. at the Novosibirsk Technical University (Russia). Joseph Varshal has extensive experience in micro-optics, diffractive optics and micro-electronics technology including modern photo-lithographic techniques, chemical and thermal processes; liquid crystal application in micro-optics technology; development and fabrication of antireflective and protective coatings; thin   film vacuum evaporation  of  metal, semiconductor and  dielectric  materials; precision  wet and dry etch   processes   of   metal,   semiconductor and dielectric  thin  films  and  substrate  materials. He participated in several joint projects with Israeli and Russian industrial companies. He has more than 47 publications and published projects, 6 inventions and patents in the field of micro-technology. Currently he serves as a Researcher at the Adaptive Micro-Nano-Optics Laboratory.